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Clean Rooms - Federal Standard 209

Clean rooms are maintained virtually free of contaminants like dust or bacteria

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Clean room maintained virtually free of contaminants like dust or bacteria are required for types of laboratory work and in the production of electronic and aerospace equipment precision parts.

The air quality for clean rooms are described in Federal Standard 209 "Airborne Particulate Cleanliness Classes in Clean Rooms and Clean Zones" (A through D) where classes are named after the maximum number of particles of 0.5 micrometers or more in diameter which is acceptable in the air.

Maximum Number of Particles in Air
(particles per cubic foot air)
ClassParticle Size
0.1 μm0.2 μm0.3 μm0.5 μm5.0 μm
1 35 7.5 3 1
10 350 75 30 10
100 750 300 100
1000 1000 7
10000 10000 70
100000 100000 700

clean room classes and number size particles diagram

In a clean room rated as "Class 10000" there may not exists more than 10000 particles larger than 0.5 microns in a cubic foot of air.

Classes and their Typical Uses

  • Class 1 & 10 - production laboratories for electronic integrated circuits ..
  • Class 100 - production areas for photo labs, medical implants ..
  • Class 10000 - production locales for TV tubes, hospital operating theaters ...
  • Class 100000 - production of ball bearings

Federal Standard 209 E uses metric units and the classes are defined as:

Maximum Number of Particles in Air
(particles per volume unit)
ClassParticle Size
0.1 μm0.2 μm0.3 μm0.5 μm5 μm
SIEnglish(m3)(ft3)(m3)(ft3)(m3)(ft3)(m3)(ft3)(m3)(ft3)
M 1 350 9.91 75.7 2.14 30.9 0.875 10.0 0.283
M 1.5 1 1240 35.0 265 7.50 106 3.00 35.3 1.00
M 2 3500 99.1 757 21.4 309 8.75 100 2.83
M 2.5 10 12400 350 2650 75.0 1060 30.0 353 10.0
M 3 35000 991 7570 214 3090 87.5 1000 28.3
M 3.5 100 26500 750 10600 300 3530 100
M 4 75700 2140 30900 875 10000 283
M 4.5 1000 35300 1000 247 7.00
M 5 100000 2830 618 17.5
M 5.5 10000 353000 10000 2470 70.0
M 6 1000000 28300 6180 175
M 6.5 100000 3350000 100000 24700 700
M 7 10000000 283000 61800 1750

clean room classes and number size particles SI diagram

Note! Federal Standard 209E is canceled and superseded by International Organization for Standardization (ISO) Standards - International Standards for Clean Rooms and associated controlled environments, ISO 14644.

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