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Clean Rooms - Federal Standard 209

Clean rooms are maintained virtually free of contaminants such as dust or bacteria

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Clean room maintained virtually free of contaminants, such as dust or bacteria, are used in laboratory work and in the production of precision parts for electronic or aerospace equipment.

The air quality of a clean rooms are described in Federal Standard 209 "Airborne Particulate Cleanliness Classes in Clean Rooms and Clean Zones" (A through D) where the classes are named after the maximum number of particles of 0.5 micrometers or more in diameter which is acceptable in air.

Maximum Number of Particles in Air
(particles per cubic foot air)
Class Particle Size
0.1 μm 0.2 μm 0.3 μm 0.5 μm 5.0 μm
1 35 7.5 3 1
10 350 75 30 10
100 750 300 100
1,000 1,000 7
10,000 10,000 70
100,000 100,000 700

clean room classes and number size particles diagram

In a clean room rated as "Class 10,000" there may not exists more than 10,000 particles larger than 0.5 microns in a cubic foot of air.

Classes and their Typical Uses

Federal Standard 209 E uses metric units and the classes are defined as:

Maximum Number of Particles in Air
(particles per volume unit)
Class Particle Size
0.1 μm 0.2 μm 0.3 μm 0.5 μm 5 μm
SI English (m3) (ft3) (m3) (ft3) (m3) (ft3) (m3) (ft3) (m3) (ft3)
M 1 350 9.91 75.7 2.14 30.9 0.875 10.0 0.283
M 1.5 1 1,240 35.0 265 7.50 106 3.00 35.3 1.00
M 2 3,500 99.1 757 21.4 309 8.75 100 2.83
M 2.5 10 12,400 350 2,650 75.0 1,060 30.0 353 10.0
M 3 35,000 991 7,570 214 3,090 87.5 1,000 28.3
M 3.5 100 26,500 750 10,600 300 3,530 100
M 4 75,700 2,140 30,900 875 10,000 283
M 4.5 1,000 35,300 1,000 247 7.00
M 5 100,000 2,830 618 17.5
M 5.5 10,000 353,000 10,000 2,470 70.0
M 6 1,000,000 28,300 6,180 175
M 6.5 100,000 3,350,000 100,000 24,700 700
M 7 10,000,000 283,000 61,800 1,750

clean room classes and number size particles SI diagram

Note! Federal Standard 209E is canceled and superseded by International Organization for Standardization (ISO) Standards - International Standards for Clean Rooms and associated controlled environments, ISO 14644.

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Related Topics

  • Ventilation Systems for ventilation and air handling - air change rates, ducts and pressure drops, charts and diagrams and more

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